Spectral ellipsometry complex Ellipse 1891 SAG

Spectral ellipsometry complex "Ellipse 1891 SAG" (wavelength range 350-1000 nm) is designed for precision measurements of the thickness of single-layer and multilayer thin-film structures, as well as investigation of the spectral optical constants (refractive index and absorption coefficient), the structural material properties (porosity, the presence of , and the concentration distribution of impurities in the film) over the entire spectral range.

The basis of the complex high-speed static scheme laid ellipsometric measurements . Algorithms for signal reading and calculation of operating parameters provide very high sensitivity needed for measurements with high spectral razresheniem.Ispolzovanie new measuring system provides a quick scan of the entire spectrum or individual sections of the spectrum with high spectral resolution.

Benefits

• versatility coupled with the high efficiency and accuracy;
• odnoznachnochnostyu calculating ellipsometric paramerov they are measured in the full range of their values ​​(Ψ - from 0 to 90 degrees ; Δ - from 0 to 360 degrees ) with the same accuracy and sensitivity, which allows unambiguous interpretation of measurement results.

Software security is a complete spectral kopleks tool holding different modes of measurement , visualization, simulation and analysis of results.

additional Features

Spectral ellipsometer may alternatively be mounted on the process chamber (in-situ option ) .

technical characteristics